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Handbook of Silicon Semiconductor Metrology
Engelsk
Bogcover for Handbook of Silicon Semiconductor Metrology af , 9780367397166
Specifikationer
Sprog:
Engelsk
Sider:
896
ISBN-13:
9780367397166
Indbinding:
Paperback
ISBN-10:
0367397161
Udg. Dato:
17 okt 2019
Størrelse i cm:
25,4 x 17,8
Oplagsdato:
17 okt 2019

Handbook of Silicon Semiconductor Metrology

Engelsk
Paperback 2019
Format:

Bog beskrivelse
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,
this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.
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Specifikationer
Sprog:
Engelsk
Sider:
896
ISBN-13:
9780367397166
Indbinding:
Paperback
ISBN-10:
0367397161
Udg. Dato:
17 okt 2019
Størrelse i cm:
25,4 x 17,8
Oplagsdato:
17 okt 2019
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