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Hf-Based High-k Dielectrics
- Process Development, Performance Characterization, and Reliability
Engelsk
Bogcover for Hf-Based High-k Dielectrics af Jack C. Lee, Young-Hee Kim, 9783031014246
Specifikationer
Sprog:
Engelsk
Sider:
92
ISBN-13:
9783031014246
Indbinding:
Paperback
ISBN-10:
3031014243
Kategori:
Udg. Dato:
31 dec 2007
Størrelse i cm:
23,5 x 19,1
Oplagsdato:
31 dec 2007
Forfatter(e):

Hf-Based High-k Dielectrics

- Process Development, Performance Characterization, and Reliability
Engelsk
Paperback 2007
Format:

Bog beskrivelse
Hard breakdown and soft breakdown, particularly the Weibull slopes, were studied under constant voltage stress. The origin of soft breakdown (first breakdown) was studied and the results suggested that the soft breakdown may be due to one layer breakdown in the bilayer structure (HfO2/SiO2: 4 nm/4 nm).
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Specifikationer
Sprog:
Engelsk
Sider:
92
ISBN-13:
9783031014246
Indbinding:
Paperback
ISBN-10:
3031014243
Kategori:
Udg. Dato:
31 dec 2007
Størrelse i cm:
23,5 x 19,1
Oplagsdato:
31 dec 2007
Forfatter(e):
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